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Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.
The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.
Here is a comparison between ESDEMC ES640 CDM Solution to others, including Thermo Scientific Orion3 CDM tester .
High resolution cameras (up to 3) allow for easy pin alignment operation
High resolution motion control system (down to 1 µm step)
Allows multiple devices being tested in a batch
Patent-pending CCDM method allows better repeatability
Airtight environment chamber increases drying unit efficiency
Support regenerative drying unit (no need of nitrogen)
General charged device model (CDM) system for package and wafer level tests
Support many popular latest CDM methods:
ANSI/ESDA/JEDEC JS-002 (FICDM)
AEC Q100-011 Rev-D (2019 Ver. follows JS-002)
AEC Q101-005 Rev-A (2019 Ver. follows JS-002)
ANSI/ESD SP5.3.3 (LI-CCDM, vf-TLP required)
CC-TLP (ESDA SP pending, vf-TLP required)
Patent pending RP-CCDM method
Legacy and customized solutions available upon request
Customizable dimension for robotic CBM (Charged Board Model) and flat panel ESD test
| Parameters | ES640-150 | ES640-300 | Units | Comments |
| Max XY Motion Area | ≥ 150 X 150 | ≥ 300 X 300 | mm | Probe motion area, customizable |
| Max DUT Area | 160 X 160 | 375 X 425 | mm | MAX Field plate area for DUT |
| Field Plate Area | 210 X 210 | 395 X 470 | mm | Field plate area |
| Z Travel | ≥ 50 | mm | ||
| Min X, Y, Z Step Size | 100 | nm | ||
| Reposition Repeatability | ≤ ±6 | μm | ||
| Test Voltage Range | ±1 to 2000 or 4000 | V | Default 2000V, customizable | |
| Test Voltage Step | 1 | V | ||
| Test Voltage Accuracy | ± 1% ± 0.1V | % V | ||
| XY Vision Resolution | 1920 X 1080 | Pixel | ||
| Vertical Vision Resolution | 2592 X 1944 | Pixel | ||
| Operating Temperature | 10 to 40 | (°C) | ||
| Operating Humidity (RH) | 0 to 80 | % | ||
| Power | 120-240 VAC, 50/60 Hz | VAC | ||
| N2 or CDA Pressure | 10 – 120 | PSI | ||
| N2 or CDA Peak Usage | 0.2 | cfm | (or 0.34 m3h) | |
| 300 N2 Tank Avg Usage | ~ 19 | hour | Continuous @ 40RH environment | |
| Desiccant Avg Usage | ~ 24 | hour | Continuous @ 40RH environment | |
ES640 Charged Device Model (CDM) Test System
| Line | Part # or Option # | Description |
| ES640 Charged Device Model (CDM) Test System | ||
| 1.1 | ES640-150 | Universal CDM platform, 150 X 150 mm Test Area, 2 kV |
| 1.2 | ES640-300 | Universal CDM platform, 300 X 300 mm Test Area, 2 kV |
| 1.3 | ES640-HC | Humidity Conditioning Unit for Air Discharge Methods (Uses reusable desiccants, lower cost of usage than N2 or CDA) |
| 1.4 | ES640-CV4 | Charge Voltage Upgrade from 2kV to 4 kV |
| ANSI/ESDA/JEDEC JS-002 Standard Related Test Solution (Followed standards include AEC_Q100-011D, AEC_Q101-005A) | ||
| 2.1 | ES640-JS002 | JS-002 Solution – System Integration Package (Including One ES640-JS002-1 Test Fixture) |
| 2.2 | ES640-JS002-C | JS002/C101 Calibration Disc (6.8 pF and 55 pF) |
| 2.3 | ES640-JS002-1 | JS-002 Test Fixture #1 (Discharge Tip 250 µm, body diameter 350 µm) |
| 2.4 | ES640-JS002-2 | JS-002 Test Fixture #2 (Discharge Tip 120 µm, body diameter 200 µm) |
| ANSI/ESD S5.3.1-2009 Standard Related Solution (Not recommend for new designs) | ||
| 3.1 | ES640-S09-F | ANSI/ESD S5.3.1-2009_FI-CDM Discharge Unit |
| 3.2 | ES640-S09-D | ANSI/ESD S5.3.1-2009_D-CDM Discharge Unit |
| 3.3 | ES640-S09-C | ANSI/ESD FR4 Calibration Module (4 and 30 pF) |
| 3.4 | ES640-J13 | JEDEC-JESD22-C101F-2013 FI-CDM Discharge Unit |
| RP-CCDM Contact First CDM Solutions (New methods for discharge stability improvements, not standardized yet) | ||
| 4.1 | ES640-RPCCDM | ESDEMC Patented Contact First CDM Solution
(Very repeatable contact first method, meets JS002 requirement, not require VF-TLP) (Including one ES640-PRCCDM-P1 Discharge Unit) |
| 4.2 | ES640-RPCCDM-P1 | RP-CCDM Discharge Unit for Packaged Device |
| 4.3 | ES640-RPCCDM-W1 | RP-CCDM Discharge Unit for Bare-die & Wafer Device |
| LI-CCDM Contact First CDM solution | ||
| 5.1 | ES640-LICCDM | LI-CCDM Discharge Solution – System Integration Package (Including one ES640-LICCDM -P1 Discharge unit, require VF-TLP) |
| 5.2 | ES640-LICCDM-P1 | LI-CCDM Discharge Unit for Packaged Device |
| 5.3 | ES640-LICCDM-W1 | LI-CCDM Discharge Unit for Bare-die & Wafer Device |
| 5.4 | ES640-vfTLP | VF-TLP module for CC-TLP or LI-CCDM Method (This VF-TLP module is a compact VF-TLP for the ES640 system. The default configuration is 1 rise-time + 1 pulse-width with limited expansion capability. If more pulse shape options are needed, model ES622 TLP/VF-TLP is the best option) |
| CC-TLP Solution | ||
| 6.1 | ES640-CCTLP | CC-TLP Solution – System Integration Package (Including 1 set of ES640-CCTLP-1-50 & calibration gauge) |
| 6.2 | CC-TLP-1-50 | CC-TLP Discharge Unit with 50m OD GND Plate |
| 6.3 | CC-TLP-1-100 | CC-TLP Discharge Unit with 100m OD GND Plate |
| 6.4 | CC-TLP-1-Cal | CC-TLP calibration gauge for needle height |
| Third Party Instruments for CDM System | ||
| 7.1 | MISC-OSC2G | Digital Oscilloscope (2 GHz, 20 Gs) |
| 7.2 | MISC-OSC6G | Digital Oscilloscope (6 GHz, 20 Gs) ES640 Charged Device Model (CDM) Test System |
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